KIER Develops High-Purity Deuterated Ammonia for Semiconductor Materials Locally

In a groundbreaking achievement, South Korea has successfully developed local production capabilities for high-purity deuterated ammonia, marking a significant step for the semiconductor industry. This revolutionary process was pioneered by the Korea Institute of Energy Research (KIER), which has managed to achieve a purity level of 99% or higher. This advancement allows South Korea to reduce its dependence on imports primarily from Japan and China.
KIER’s Local Production of Deuterated Ammonia
On November 11th, KIER announced that a team led by Principal Researcher Hyungchul Yoon has created the country’s first technology for producing deuterated ammonia. This compound, known as ND₃, is an essential material in semiconductor manufacturing as it significantly suppresses defects in devices.
Key Production Details
- Daily Production: The research team is capable of producing 7.7 kg of deuterated ammonia daily.
- Innovative Catalyst: They achieved this using a proprietary ruthenium-based catalyst, which enhances the efficiency of the synthesis process.
- Reaction Conditions: The new method operates at reduced pressure—approximately one-fifth of conventional methods—and benefits from optimized temperature conditions.
Enhanced Chemical Process
The effective design incorporates barium oxide into the ruthenium catalyst. This innovation increases the electron density on the catalyst’s surface, weakening the bonds of nitrogen molecules. Consequently, the nitrogen dissociation reaction, which is energy-intensive, now occurs at much lower energy levels.
Durability and Certification
After maintaining continuous operation for over 1,000 hours, the developed process received certification from the Korea Testing Laboratory (KTL). It has been confirmed that no impurities harmful to semiconductor performance are generated during production, ensuring the creation of ultra-high-purity deuterated ammonia.
Future Aspirations
Following this notable achievement, the KIER team plans to refine the production process and scale up operations. Their vision includes establishing a robust domestic production base, aiming to cater to the isotope materials market in sectors such as semiconductors, displays, and fine chemicals.
Hyungchul Yoon emphasized the importance of this breakthrough, stating that it highlights the potential for producing high-value isotope materials domestically. He expressed intentions to leverage their innovative low-pressure and low-temperature technology to develop a high-performance chemical materials production platform for various industries.
This landmark development underscores South Korea’s commitment to advancing its technological capabilities in the semiconductor sector, ultimately reducing import reliance and positioning itself within the global specialty gas market.



